This text provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition, metal-organic chemical vapour deposition, plasma processing, rapid thermal processing and crystal growth, as well as defining the basic principles of transport phenomena, gas phase and surface reactions in electronics materials processing. In addition, it explains how to apply practical numerical techniques used in process simulation, and ...
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This text provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition, metal-organic chemical vapour deposition, plasma processing, rapid thermal processing and crystal growth, as well as defining the basic principles of transport phenomena, gas phase and surface reactions in electronics materials processing. In addition, it explains how to apply practical numerical techniques used in process simulation, and presents the numerical methods necessary to produce simulation codes.
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Add this copy of Computational Modeling in Semiconductor Processing to cart. $29.56, very good condition, Sold by ThriftBooks-Dallas rated 5.0 out of 5 stars, ships from Dallas, TX, UNITED STATES, published 1995 by Artech House Publishers.
Add this copy of Computational Modeling in Semiconductor Processing to cart. $33.54, very good condition, Sold by BookDrop rated 4.0 out of 5 stars, ships from Phoenix, AZ, UNITED STATES, published 1994 by Artech House Publishers.
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Add this copy of Computational Modeling in Semiconductor Processing to cart. $48.60, good condition, Sold by HPB-Red rated 5.0 out of 5 stars, ships from Dallas, TX, UNITED STATES, published 1994 by Artech House.
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