Now updated, this handbook addresses wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. It discusses both wet and plasma-based cleaning technologies that are used for removing contamination, particles, and residue from wafer surfaces.
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Now updated, this handbook addresses wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. It discusses both wet and plasma-based cleaning technologies that are used for removing contamination, particles, and residue from wafer surfaces.
Read Less
Add this copy of Handbook of Silicon Wafer Cleaning Technology to cart. $40.58, fair condition, Sold by ThriftBooks-Atlanta rated 5.0 out of 5 stars, ships from Austell, GA, UNITED STATES, published 2008 by William Andrew.
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Add this copy of Handbook of Silicon Wafer Cleaning Technology to cart. $326.12, new condition, Sold by Media Smart rated 4.0 out of 5 stars, ships from Hawthorne, CA, UNITED STATES, published 2018 by William Andrew Publishing.