Introductory Mems: Fabrication and Applications

This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style. Read More

This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style. Read Less

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  	This is a digital edition of this title. Rent eBook (5 Options) 30 Day Rental: $27.00 (Expires Jul 27, 2025) 60 Day Rental: $36.00 (Expires Aug 26, 2025) 90 Day Rental: $45.00 (Expires Sep 25, 2025) 120 Day Rental: $54.00 (Expires Oct 25, 2025) 180 Day Rental: $58.50 (Expires Dec 24, 2025) Buy eBook Lifetime Access: $89.99 Title: Introductory Mems by Thomas M. Adams; Richard A. Layton Publisher: Springer Nature Print ISBN: 9780387095103, 0387095101 eText ISBN: 9780387095110 Edition: 2009 Format: PDF eBook	$27.00 Rent eBook This is a digital eBook Nothing will be shipped to you Works with web browsers and the VitalSource app on all Windows, Mac, Chromebook, Kindle Fire, iOS, and Android devices Most eBooks are returnable within 14 days of purchase Questions? See our eBook FAQ