Detailing both elementary and advanced aspects of submicron microlithography, this book provides a balanced treatment of theoretical and operating practices, as well as information on current research in the field. It includes dicussions on electron beam, X-ray and proximal probe techniques.; College of university bookstores may order five or more copies at a special student price. Price is available upon request.
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Detailing both elementary and advanced aspects of submicron microlithography, this book provides a balanced treatment of theoretical and operating practices, as well as information on current research in the field. It includes dicussions on electron beam, X-ray and proximal probe techniques.; College of university bookstores may order five or more copies at a special student price. Price is available upon request.
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New. Sewn binding. Cloth over boards. 838 p. Contains: Illustrations, black & white, Tables, black & white. In Stock. 100% Money Back Guarantee. Brand New, Perfect Condition, allow 4-14 business days for standard shipping. To Alaska, Hawaii, U.S. protectorate, P.O. box, and APO/FPO addresses allow 4-28 business days for Standard shipping. No expedited shipping. All orders placed with expedited shipping will be cancelled. Over 3, 000, 000 happy customers.