Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as ...
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Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
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Add this copy of Microsystem Technology and Microrobotics (Microsystem to cart. $34.07, good condition, Sold by HPB-Red rated 5.0 out of 5 stars, ships from Dallas, TX, UNITED STATES, published 1997 by Springer.
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Add this copy of Microsystem Technology and Microrobotics (Microsystem to cart. $74.40, good condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Santa Clarita, CA, UNITED STATES, published 1997 by Springer.
Add this copy of Microsystem Technology and Microrobotics to cart. $168.69, new condition, Sold by Ingram Customer Returns Center rated 5.0 out of 5 stars, ships from NV, USA, published 2010 by Springer-Verlag Berlin and Heidelberg GmbH & Co. K.
Edition:
2010, Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Add this copy of Microsystem Technology and Microrobotics to cart. $168.69, new condition, Sold by Ingram Customer Returns Center rated 5.0 out of 5 stars, ships from NV, USA, published 1997 by Springer.
Add this copy of Microsystem Technology and Microrobotics to cart. $176.87, new condition, Sold by Ria Christie Books rated 4.0 out of 5 stars, ships from Uxbridge, MIDDLESEX, UNITED KINGDOM, published 2010 by Springer-Verlag Berlin and Heidelberg GmbH & Co. K.
Edition:
2010, Springer-Verlag Berlin and Heidelberg GmbH & Co. K
Add this copy of Microsystem Technology and Microrobotics to cart. $176.87, new condition, Sold by Ria Christie Books rated 4.0 out of 5 stars, ships from Uxbridge, MIDDLESEX, UNITED KINGDOM, published 1997 by Springer.
