"This book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical lithography, learn the basics of exposure systems and image formation, and come away with a full understanding of system components, processing, and optimization. Readers will also get a primer on the outlook of optical lithography and the many next ...
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"This book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical lithography, learn the basics of exposure systems and image formation, and come away with a full understanding of system components, processing, and optimization. Readers will also get a primer on the outlook of optical lithography and the many next-generation technologies that may greatly enhance semiconductor manufacturing in the near future. This second edition has brand new material on proximity printing, as well as updated and expanded material on: exposure systems, image formation, E-D methodology, hardware components, processing and optimization, and EUV and immersion lithographies"--
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Add this copy of Optical Lithography to cart. $52.51, good condition, Sold by Books2anywhere rated 5.0 out of 5 stars, ships from Fairford, GLOUCESTERSHIRE, UNITED KINGDOM, published 2021 by John Wiley & Sons.
Edition:
2021, SPIE-International Society for Optical Engineering
Publisher:
SPIE-International Society for Optical Engineering
Published:
11/30/2021 12: 00: 00 AM
Language:
English
Alibris ID:
18361055494
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Good. PLEASE NOTE, WE DO NOT SHIP TO DENMARK. Used Book. Shipped from UK in 4 to 14 days. Established seller since 2000. Please note we cannot offer an expedited shipping service from the UK.
Add this copy of Optical Lithography to cart. $55.80, good condition, Sold by Paperbackshop International rated 5.0 out of 5 stars, ships from Fairford, GLOS, UNITED KINGDOM, published 2021 by John Wiley & Sons.
Edition:
2021, SPIE-International Society for Optical Engineering
Publisher:
SPIE-International Society for Optical Engineering
Published:
11/30/2021 12: 00: 00 AM
Language:
English
Alibris ID:
18361092630
Shipping Options:
Standard Shipping: $4.90
Choose your shipping method in Checkout. Costs may vary based on destination.
Seller's Description:
Good. PLEASE NOTE, WE DO NOT SHIP TO DENMARK. Used Book. Shipped from UK in 4 to 14 days. Established seller since 2000. Please note we cannot offer an expedited shipping service from the UK.
Add this copy of Optical Lithography: Here is Why, Second Edition to cart. $163.02, good condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Santa Clarita, CA, UNITED STATES, published 2021 by SPIE--The International Societ.
Edition:
2021, SPIE-International Society for Optical Engineering
Add this copy of Optical Lithography: Here is Why, Second Edition to cart. $206.69, very good condition, Sold by BooksRun rated 4.0 out of 5 stars, ships from Philadelphia, PA, UNITED STATES, published 2021 by SPIE--The International Society for Optical Engineering.
Edition:
2021, SPIE-International Society for Optical Engineering
Add this copy of Optical Lithography: Here is Why, Second Edition to cart. $207.24, new condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Santa Clarita, CA, UNITED STATES, published 2021 by SPIE--The International Societ.
Edition:
2021, SPIE-International Society for Optical Engineering
