This is an introduction to the science of microlithography. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
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This is an introduction to the science of microlithography. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
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Add this copy of Principles of Lithography, Second Edition (Spie Press to cart. $51.50, very good condition, Sold by Eastburn Books rated 5.0 out of 5 stars, ships from Albany, OR, UNITED STATES, published 2005 by SPIE Publications.
Edition:
2005, SPIE-International Society for Optical Engineering
Publisher:
SPIE-International Society for Optical Engineering
Published:
2005
Language:
English
Alibris ID:
18417927150
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Very Good. No Jacket. Book VG purple hardcover. 2005. 2nd Edition. Diagrams/photos heavily throughout. Pages all clean/unmarked. Covers bright and clean with LIghtest scuffs/wear. OVERSIZE volume. 423 pp.
Add this copy of Principles of Lithography, Second Edition (Spie Press to cart. $65.64, good condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Santa Clarita, CA, UNITED STATES, published 2005 by SPIE Publications.
Edition:
2005, SPIE-International Society for Optical Engineering
Add this copy of Principles of Lithography (Spie Press Monograph Vol. to cart. $73.45, good condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Santa Clarita, CA, UNITED STATES, published 2001 by Society of Photo Optical.
Edition:
2001, SPIE-International Society for Optical Engineering
Add this copy of Principles of Lithography, Second Edition (Spie Press to cart. $83.88, new condition, Sold by Just one more Chapter rated 3.0 out of 5 stars, ships from Miramar, FL, UNITED STATES, published 2005 by SPIE Publications.
Edition:
2005, SPIE-International Society for Optical Engineering
Add this copy of Principles of Lithography to cart. $84.95, very good condition, Sold by Flamingo Books rated 5.0 out of 5 stars, ships from Menifee, CA, UNITED STATES, published 2019 by Society of Photo Optical.
Edition:
2020, SPIE-International Society for Optical Engineering
Publisher:
SPIE-International Society for Optical Engineering
Published:
05/2019
Language:
English
Alibris ID:
18428954258
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Very Good. Size: 10x1x7; 2019 fourth edition, SPIE Press (Bellingham, Washington), 7 1/4 x 10 1/4 inches tall blue pictorial hardcover, no dust jacket (as issued), copiously illustrated with black-and-white and a few color photographs and drawings or diagrams, xvi, 571 pp. Very slight rubbing and edgewear to covers, with a 1/8-inch tear to the top spine cap. Otherwise, a very good to near fine copy-clean, bright and unmarked. Note that this is a heavy and oversized book, so additional postage will be required for international or priority orders. ~SP13~ [4.0P] This text is intended to serve as an introduction to the science of microlithography, but also covers several subjects in depth, making it useful to the experienced lithographer as well. Topics directly related to manufacturing tools are addressed, including overlay, the stages of exposure, tools, and light sources. This updated edition reflects recent advances in technology, including the shift of immersion lithography from development into volume manufacturing, and the movement of EUV lithography fromthe lab to development pilot lines. New references and homework problems are included. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus. Contents: Overview of lithography; Optical pattern formation; Photoresists; Modeling and thin-film effects; Wafer steppers and scanners; Overlay; Masks and reticles; Confronting the diffraction limit; Metrology; Immersion lithography and the limits of optical lithography; Lithography costs; Extreme ultraviolet lithography; Alternative lithography techniques.
Add this copy of Principles of Lithography, Fourth Edition to cart. $88.30, good condition, Sold by HPB-Red rated 5.0 out of 5 stars, ships from Dallas, TX, UNITED STATES, published 2019 by SPIE--The International Society.
Edition:
2020, SPIE-International Society for Optical Engineering
Publisher:
SPIE-International Society for Optical Engineering
Published:
2019
Language:
English
Alibris ID:
18074372000
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Good. Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or limited writing/highlighting. We ship orders daily and Customer Service is our top priority!
Add this copy of Principles of Lithography (Spie Press Monograph Vol. to cart. $102.84, new condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Santa Clarita, CA, UNITED STATES, published 2001 by Bellingham, Washington, U.S. A.
Edition:
2001, SPIE-International Society for Optical Engineering
Add this copy of Principles of Lithography to cart. $113.94, new condition, Sold by discount_scientific_books rated 5.0 out of 5 stars, ships from Sterling Heights, MI, UNITED STATES, published 2005 by SPIE-International Society for Optical Engineering.
Edition:
2005, SPIE-International Society for Optical Engineering
Add this copy of Principles of Lithography to cart. $145.05, good condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Santa Clarita, CA, UNITED STATES, published 2019 by Society of Photo Optical.
Edition:
2020, SPIE-International Society for Optical Engineering
