Ideal for upper-level undergraduate or first-year graduate courses and as a handy reference for professionals, The Science and Engineering of Microelectronic Fabrication, Second Edition , provides a thorough and accessible introduction to the field of microfabrication. Revised and expanded in this second edition, the text covers all the basic unit processes used to fabricate integrated circuits, including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase ...
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Ideal for upper-level undergraduate or first-year graduate courses and as a handy reference for professionals, The Science and Engineering of Microelectronic Fabrication, Second Edition , provides a thorough and accessible introduction to the field of microfabrication. Revised and expanded in this second edition, the text covers all the basic unit processes used to fabricate integrated circuits, including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering, and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, next generation lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacture of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of current state-of-the-art devices. Each chapter includes sample problems with solutions. The text makes use of the popular process simulation package SUPREM to provide more meaningful examples of the type of real-world dopant redistribution problems that microelectronic fabrication engineers must face. This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etching techniques; bulk micromachining process flow; surface micromachining basics; surface micromachining process flow; MEMS actuators; and high aspect ratio microsystems technology (HARMST).
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Add this copy of The Science and Engineering of Microelectronic to cart. $9.67, fair condition, Sold by BooksRun rated 5.0 out of 5 stars, ships from Philadelphia, PA, UNITED STATES, published 1996 by Oxford University Press.
Add this copy of The Science and Engineering of Microelectronic to cart. $9.78, good condition, Sold by ThriftBooks-Atlanta rated 5.0 out of 5 stars, ships from Austell, GA, UNITED STATES, published 1996 by Oxford University Press.
Add this copy of The Science and Engineering of Microelectronic to cart. $9.78, good condition, Sold by ThriftBooks-Reno rated 5.0 out of 5 stars, ships from Reno, NV, UNITED STATES, published 1996 by Oxford University Press.
Add this copy of The Science and Engineering of Microelectronic to cart. $9.78, good condition, Sold by ThriftBooks-Dallas rated 5.0 out of 5 stars, ships from Dallas, TX, UNITED STATES, published 1996 by Oxford University Press.
Add this copy of The Science and Engineering of Microelectronic to cart. $9.78, good condition, Sold by ThriftBooks-Baltimore rated 5.0 out of 5 stars, ships from Halethorpe, MD, UNITED STATES, published 1996 by Oxford University Press.
Add this copy of The Science and Engineering of Microelectronic to cart. $9.78, fair condition, Sold by ThriftBooks-Dallas rated 5.0 out of 5 stars, ships from Dallas, TX, UNITED STATES, published 1996 by Oxford University Press.
Add this copy of The Science and Engineering of Microelectronic to cart. $14.77, good condition, Sold by ThriftBooks-Atlanta rated 5.0 out of 5 stars, ships from Austell, GA, UNITED STATES, published 2001 by Oxford University Press, USA.
Add this copy of The Science and Engineering of Microelectronic to cart. $17.33, poor condition, Sold by Anybook rated 4.0 out of 5 stars, ships from Lincoln, UNITED KINGDOM, published 1996 by Oxford University Press Inc.
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Seller's Description:
This is an ex-library book and may have the usual library/used-book markings inside. This book has hardback covers. Clean from markings. In poor condition, suitable as a reading copy. No dust jacket. Please note the Image in this listing is a stock photo and may not match the covers of the actual item, 1250grams, ISBN: 9780195105087.
Add this copy of The Science and Engineering of Microelectronic to cart. $19.99, good condition, Sold by Alien Bindings rated 5.0 out of 5 stars, ships from BALTIMORE, MD, UNITED STATES, published 1995 by Oxford University Press.
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Seller's Description:
Hardcover edition in Good+ condition. There are sparse highlights and underlining in ink; otherwise, the book is in Very Good condition. The covers are in great shape. The edges of the text block are stamped. The binding is square and tight. Small abrasion to the front flyleaf. The book will be carefully packaged for shipment for protection from the elements. USPS electronic tracking number issued free of charge. 536 pages.
