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Foundations of Mems
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RF Mems and Their Applications
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K J Vinoy
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Handbook of Silicon Based...
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MEMS and Microsystems: Design...
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Mems and Microsystems: Design...
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Microsystem Design
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Introduction to Microfluidics
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Yury Nikitin
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Dr. Sami Franssila
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Mems Product Development:...
Alissa M. Fitzgerald,
Carolyn D. White
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Victor Giurgiutiu,
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Micromachined Transducers...
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