This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tungsten (W) into a single manageable volume. The book supplies the reader with the necessary background to bring up, fine tune, and successfully maintain a CVD-W process in a production set-up. Materials deposition chemistry, equipment, process technology, developments, and applications are described.
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This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tungsten (W) into a single manageable volume. The book supplies the reader with the necessary background to bring up, fine tune, and successfully maintain a CVD-W process in a production set-up. Materials deposition chemistry, equipment, process technology, developments, and applications are described.
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Add this copy of Chemical Vapor Deposition of Tungsten and Tungsten to cart. $52.95, very good condition, Sold by Daedalus Books rated 5.0 out of 5 stars, ships from Portland, OR, UNITED STATES, published 1992 by Noyes Publications.
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Near Fine in Near Fine dust jacket. 0815512880. A nice, solid copy.; Materials Science And Process Technology Series; 6.25 X 1.25 X 9.5 inches; 235 pages.
Add this copy of Chemical Vapor Deposition of Tungsten and Tungsten to cart. $45.30, good condition, Sold by Books From California rated 4.0 out of 5 stars, ships from Simi Valley, CA, UNITED STATES, published 1993 by William Andrew.
Add this copy of Chemical Vapor Deposition of Tungsten and Tungsten to cart. $91.99, good condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Santa Clarita, CA, UNITED STATES, published 1993 by William Andrew.
