MEMS and NEMS: Systems,...
Sergey Edward Lyshevski
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Microsystem Design
Stephen D Senturia
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Silicon Sensors and Actuators...
Benedetto Vigna (Editor),
Paolo Ferrari (Editor)
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Mems and Microsystems: Design...
Tai-Ran Hsu
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Mems Packaging
Yung-cheng Lee (Editor),
Yu-ting Cheng (Editor)
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Materials & Process...
Francis E. H. Tay (Editor)
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Optical Inspection of...
Wolfgang Osten (Editor)
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Micromechatronics, Second...
Kenji Uchino
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Fundamentals Applics...
Nam-Trung Nguyen
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A Guide to Hands-On Mems...
Joel A Kubby
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Modeling Mems and Nems
John A Pelesko,
David H Bernstein
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Introduction to Microfluidics
Professor Patrick Tabeling
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Handbook of Silicon Based...
Markku Tilli (Editor),
Mervi Paulasto-Kr÷ckel (Editor)
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MEMS Mechanical Sensors
Stephen Beeby
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Diagnostics of Mechatronic...
Pavol Bozek,
Yury Nikitin
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Mems Silicon Oscillating...
Yong Ping Xu (Editor)
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Micromechatronics: Modeling,...
Victor Giurgiutiu,
Sergey Edward Lyshevski
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Mems-Based Circuits and...
Christian Enz
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Mems Product Development:...
Alissa M. Fitzgerald,
Carolyn D. White
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Self Assembly: The Science of...
John A. Pelesko
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Mems Reliability
Allyson L Hartzell,
Mark G Da Silva
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Photonic Microresonator...
Ioannis Chremmos (Editor),
Otto Schwelb (Editor)
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RF-MEMS Technology for High...
Jacopo Iannacci
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Whole-Angle MEMS Gyroscopes:...
Doruk Senkal,
Andrei M. Shkel
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