Principles of Plasma...
Michael A Lieberman,
Allan J Lichtenberg
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Plasma Etching Processes for...
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Micromachining Using...
Rolf Wuthrich,
Jana D. Abou Ziki
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Principles of Plasma...
Michael A Lieberman,
Alan J Lichtenberg
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Plasma Etching: Fundamentals...
Professor M Sugawara,
Barry L Stansfield
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Principles of Plasma...
Michael A Lieberman, PhD,
Allan J Lichtenberg
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Photons and Low Energy...
Carol I. H. Asby (Editor),
James H. Brannon (Editor)
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Handbook of Plasma Processing...
Stephen M Rossnagel,
William D Westwood
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Plasma Deposition, Treatment,...
Riccardo D'Agostino (Editor),
Daniel L Flamm (Editor)
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In-Situ Patterning:: Volume...
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Jerry G. Black (Editor)
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Plasma Etching: An...
Dennis M Manos (Editor),
Daniel L Flamm (Editor)
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Glow Discharge Processes:...
Brian Chapman
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Proceedings of the...
G S Mathad (Editor),
B Agius (Editor)
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Photon-Assisted Processing of...
J Dieleman
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Applications of Plasma...
Takuo Sugano (Editor)
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Dry Etching for...
Ronald A Powell
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